Nanomechanics Research Group

Theme/Field

Micro/nanomechanical devices enable the pursuit of new physical phenomenon that can only be observed in these dynamical systems to probe the fundamental nature of the world as well enabling the development of nanoscience and nanotechnology. These systems can be manipulated by electrical or optical means permitting applications such as ultra-high sensitivity detectors for weak forces as well as mechanical signal processing to be developed.

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Dr. Hajime Okamoto
Group Leader
Dr. Hajime Okamoto

Fabricating a mechanical resonator using semiconductor materials allows the opto-electro-mechanical transduction to be mediated via the piezoelectric effect. This piezoelectric transduction induces nonlinear dynamics in the mechanical vibration, enabling the parametric amplification as well as the beam splitter-type interaction to be externally controlled. The scheme can be applied to demonstrate various novel device functionalities. The piezoelectricity induces also the carrier-mediated optomechanical interaction, which allows efficient light-mechanics transduction. We also study hybrid micro/nanomechanical devices by integrating the mechanical resonators with semiconductor quantum structures, such like quantum wells and quantum dots.

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Topics by Group

Publications in 2020

  1. D. Hatanaka, and H. Yamaguchi

    Real-Space Characterization of Cavity-Coupled Waveguide Systems in Hypersonic Phononic Crystals

    Phys. Rev. Appl. 13 (2), 024005 (2020).

  2. M. Kurosu, D. Hatanaka, and H. Yamaguchi

    Mechanical Kerr Nonlinearity of Wave Propagation in an On-Chip Nanoelectromechanical Waveguide

    Phys. Rev. Appl. 13 (1), 014056 (2020).

  3. S. Houri, D. Hatanaka, M. Asano, and H. Yamaguchi

    Demonstration of Multiple Internal Resonances in a Microelectromechanical Self-Sustained Oscillator

    Phys. Rev. Appl. 13 (1), 014049 (2020).

  4. W. Tomita, S. Sasaki, K. Tateno, H. Okamoto, and H. Yamaguchi

    Novel Fabrication Technique of Suspended Nanowire Devices for Nanomechanical Applications

    Phys. Status Solidi B-Basic Solid State Phys. 257 (2), 1900401 (2020).

  1. W. Tomita, S. Sasaki, K. Tateno, H. Okamoto, and H. Yamaguchi

    Novel Fabrication Technique of Suspended Nanowire Devices for Nanomechanical Applications

    Phys. Status Solidi B-Basic Solid State Phys. , 1900401 (2019).

  2. M. Asano, R. Ohta, T. Aihara, T. Tsuchizawa, H. Okamoto, and H. Yamaguchi

    Optically probing Schwinger angular momenta in a micromechanical resonator

    Phys. Rev. A 100 (5), 053801 (2019).

  3. S. Houri, R. Ohta, M. Asano, Y. M. Blanter, and H. Yamaguchi

    Pulse-width modulated oscillations in a nonlinear resonator under two-tone driving as a means for MEMS sensor readout

    Jpn. J. Appl. Phys. 58 (SB), SBBI05 (2019).

  4. H. Toida, Y. Matsuzaki, K. Kakuyanagi, X. B. Zhu, W. J. Munro, H. Yamaguchi, and S. Saito

    Electron paramagnetic resonance spectroscopy using a single artificial atom

    Commun. Phys. 2, 33 (2019).

  5. R. Ohta, H. Okamoto, T. Tawara, H. Gotoh, and H. Yamaguchi

    Strain-induced exciton decomposition and anisotropic lifetime modulation in a GaAs micromechanical resonator

    Phys. Rev. B 99 (11), 115315 (2019).

  6. S. Houri, D. Hatanaka, M. Asano, R. Ohta, and H. Yamaguchi

    Limit cycles and bifurcations in a nonlinear MEMS resonator with a 1:3 internal resonance

    Appl. Phys. Lett. 114 (10), 103103 (2019).

  7. D. Hatanaka, A. Bachtold, and H. Yamaguchi

    Electrostatically Induced Phononic Crystal

    Phys. Rev. Appl. 11 (2), 024024 (2019).

  8. P. Renault, H. Yamaguchi, and I. Mahboob

    Virtual Exceptional Points in an Electromechanical System

    Phys. Rev. Appl. 11 (2), 024007 (2019).

  9. A. A. Shevyrin, A. K. Bakarov, A. A. Shklyaev, A. S. Arakcheev, M. Kurosu, H. Yamaguchi, and A. G. Pogosov

    On-Chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-Dimensional Electron Gas

    Jetp Lett. 109 (4) 261-265 (2019).

  10. R. J. Dolleman, P. Belardinelli, S. Houri, H. S. van der Zant, F. Alijani, and P. G. Steeneken

    High-Frequency Stochastic Switching of Graphene Resonators Near Room Temperature

    Nano Lett. 19 (2) 1282-1288 (2019).

  1. D. Hatanaka, A. Gourmelon, I. Mahboob, and H. Yamaguchi

    Selective activation of localized mechanical resonators via a phonon waveguide

    Appl. Phys. Lett. 113 (4), 043104 (2018).

  2. R. Ohta, H. Okamoto, T. Tawara, H. Gotoh, and H. Yamaguchi

    Dynamic Control of the Coupling between Dark and Bright Excitons with Vibrational Strain

    Phys. Rev. Lett. 120 (26), 267401 (2018).

  3. M. Asano, R. Ohta, T. Yamamoto, H. Okamoto, and H. Yamaguchi

    An opto-electro-mechanical system based on evanescently-coupled optical microbottle and electromechanical resonator

    Appl. Phys. Lett. 112 (20), 201103 (2018).

  4. M. Kurosu, D. Hatanaka, K. Onomitsu, and H. Yamaguchi

    On-chip temporal focusing of elastic waves in a phononic crystal waveguide

    Nat. Commun. 9, 1331 (2018).

  5. R. P. Budoyo, K. Kakuyanagi, H. Toida, Y. Matsuzaki, W. J. Munro, H. Yamaguchi, and S. Saito

    Phonon-bottlenecked spin relaxation of Er3+:Y2SiO5 at sub-kelvin temperatures

    Appl. Phys. Express 11 (4), 043002 (2018).

  1. D. Hatanaka, T. Darras, I. Mahboob, K. Onomitsu, and H. Yamaguchi

    Broadband reconfigurable logic gates in phonon waveguides

    Sci Rep 7, 12745 (2017).

  2. H. Yamaguchi

    GaAs-based micro/nanomechanical resonators

    Semicond. Sci. Technol. 32 (10), 103003 (2017).

  3. R. Ohta, H. Okamoto, and H. Yamaguchi

    Feedback control of multiple mechanical modes in coupled micromechanical resonators

    Appl. Phys. Lett. 110 (5), 053106 (2017).

  4. R. Ohta, Y. Ueno, and K. Ajito

    Raman Spectroscopy of Pharmaceutical Cocrystals in Nanosized Pores of Mesoporous Silica

    Anal. Sci. 33 (1) 47-52 (2017).

  5. I. Mahboob, M. Villiers, K. Nishiguchi, D. Hatanaka, A. Fujiwara and H. Yamaguchi

    A correlated electromechanical system

    New J. Phys. 19, 033026 (2017).

  1. K. Kakuyanagi, Y. Matsuzaki, C. Deprez, H. Toida, K. Semba, H. Yamaguchi, W. J. Munro and S. Saito

    Observation of Collective Coupling between an Engineered Ensemble of Macroscopic Artificial Atoms and a Superconducting Resonator

    Phys. Rev. Lett. 117 (21), 210503 (2016)

  2. I. Mahboob, R. Dupuy, K. Nishiguchi, A. Fujiwara and H. Yamaguchi

    Hopf and period-doubling bifurcations in an electromechanical resonator

    Appl. Phys. Lett. 109 (7), 073101 (2016)

  3. M. Villiers, I. Mahboob, K. Nishiguchi, D. Hatanaka, A. Fujiwara and H. Yamaguchi

    An electromechanical displacement transducer

    Appl. Phys. Express 9 (8), 086701 (2016)

  4. Y. Matsuzaki, H. Morishita, T. Shimooka, T. Tashima, K. Kakuyanagi, K. Semba, W. J. Munro, H. Yamaguchi, N. Mizuochi and S. Saito

    Optically detected magnetic resonance of high-density ensemble of NV- centers in diamond

    J. Phys.-Condes. Matter 28 (27), 275302 (2016)

  5. H. Okamoto, R. Schilling, H. Schutz, V. Sudhir, D. J. Wilson, H. Yamaguchi and T. J. Kippenberg

    A strongly coupled K-type micromechanical system

    Appl. Phys. Lett. 108 (15), 153105 (2016)

  6. Y. Okazaki, I. Mahboob, K. Onomitsu, S. Sasaki and H. Yamaguchi

    Gate-controlled electromechanical backaction induced by a quantum dot

    Nat. Commun. 7 11132 (2016)

  7. H. Toida, Y. Matsuzaki, K. Kakuyanagi, X. B. Zhu, W. J. Munro, K. Nemoto, H. Yamaguchi and S. Saito

    Electron paramagnetic resonance spectroscopy using a direct current-SQUID magnetometer directly coupled to an electron spin ensemble

    Appl. Phys. Lett. 108 (5), 052601 (2016)

  8. M. Takamura, H. Okamoto, K. Furukawa, H. Yamaguchi and H. Hibino

    Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges

    Micromachines 7 (9), 158 (2016)

  9. G. C. Knee, K. Kakuyanagi, M. C. Yeh, Y. Matsuzaki, H. Toida, H. Yamaguchi, S. Saito, A. J. Leggett, and W. J. Munro

    A strict experimental test of macroscopic realism in a superconducting flux qubit

    Nat. Commun. 7, 13253 (2016).

  10. I. Mahboob, H. Okamoto, and H. Yamaguchi

    Enhanced visibility of two-mode thermal squeezed states via degenerate parametric amplification and resonance

    New J. Phys. 18, 083009 (2016)

  11. I. Mahboob, H. Okamoto, and H. Yamaguchi

    An electromechanical Ising Hamiltonian

    Sci. Adv. 2 (6), e1600236 (2016)

  1. D. Hatanaka, A. Dodel, I. Mahboob, K. Onomitsu and H. Yamaguchi

    Phonon propagation dynamics in band-engineered one dimensional phononic crystal waveguides

    New J. Phys. 17, 113032 (2015)

  2. T. Tanaka, P. Knott, Y. Matsuzaki, S. Dooley, H. Yamaguchi, W. J. Munro and S. Saito

    Proposed Robust Entanglement-Based Magnetic Field Sensor Beyond the Standard Quantum Limit

    Phys. Rev. Lett. 115, 170801 (2015)

  3. H. Okamoto, T. Watanabe, R. Ohta, K. Onomitsu, H. Gotoh, T. Sogawa and H. Yamaguchi

    Cavity-less on-chip optomechanics using excitonic transitions in semiconductor heterostructures

    Nat. Commun. 6, 8478 (2015)

  4. H. Cai, Y. Matsuzaki, K. Kakuyanagi, H. Toida, X. Zhu, N. Mizuochi, K. Nemoto, K. Semba, W. J. Munro, S. Saito and H. Yamaguchi

    Analysis of the spectroscopy of a hybrid system composed of a superconducting flux qubit and diamond NV- centers

    J. Phys.-Condes. Matter 27, 345702 (2015)

  5. R. Ohta, H. Okamoto, R. Hey, K. J. Friedland and H. Yamaguchi

    Optically induced strong intermodal coupling in mechanical resonators at room temperature

    Appl. Phys. Lett. 107, 091906 (2015)

  6. K. Yamazaki and H. Yamaguchi

    Renovation of three-dimensional electron beam lithography for improvement of positioning accuracy and reduction of turnaround time

    Jpn. J. Appl. Phys. 54, 06FD02 (2015)

  7. T. Satoh, Y. Matsuzaki, K. Kakuyanagi, W. J. Munro, K. Semba, H. Yamaguchi and S. Saito

    Scalable quantum computation architecture using always-on Ising interactions via quantum feedforward

    Phys. Rev. A 91, 052329 (2015)

  8. Y. Matsuzaki, X. Zhu, K. Kakuyanagi, H. Toida, T. Shimooka, N. Mizuochi, K. Nemoto, K. Semba, W. J. Munro, H. Yamaguchi and S. Saito

    Improving the lifetime of the nitrogen-vacancy-center ensemble coupled with a superconducting flux qubit by applying magnetic fields

    Phys. Rev. A 91, 042329 (2015)

  9. I. Mahboob, N. Perrissin, K. Nishiguchi, D. Hatanaka, Y. Okazaki, A. Fujiwara and H. Yamaguchi

    Dispersive and Dissipative Coupling in a Micromechanical Resonator Embedded with a Nanomechanical Resonator

    Nano Lett. 15, 2312-2317 (2015)

  10. Y. Matsuzaki, X. Zhu, K. Kakuyanagi, H. Toida, T. Shimo-Oka, N. Mizuochi, K. Nemoto, K. Semba, W. J. Munro, H. Yamaguchi, and S. Saito

    Improving the Coherence Time of a Quantum System via a Coupling to a Short-Lived System

    Phys. Rev. Lett. 114, 120501 (2015)

  11. K. Nishiguchi, A. Castellanos-Gomez, H. Yamaguchi, A. Fujiwara, H. S. J. van der Zant and G. A. Steele

    Observing the semiconducting band-gap alignment of MoSし2た layers of different atomic thicknesses using a MoSし2た/SiOし2た/Si heterojunction tunnel diode

    Appl. Phys. Lett. 107, 053101 (2015)

  1. D. Hatanaka, I. Mahboob, K. Onomitsu and H. Yamaguchi

    Phonon waveguides for electromechanical circuits

    Nat. Nanotechnol. 9 (7), 520-524 (2014)

  2. D. Hatanaka, I. Mahboob, K. Onomitsu and H. Yamaguchi

    Mechanical random access memory in a phonon circuit

    Appl. Phys. Express 7, 125201 (2014)

  3. J.R. Johansson, N. Lambert, I. Mahboob, H. Yamaguchi and F. Nori

    Entangled-state generation and Bell inequality violations in nanomechanical resonators

    Phys. Rev. B, Condens. Matter Mater. Phys. 90 (17), 174307 (2014)

  4. I. Mahboob, M. Mounaix, K. Nishiguchi, A. Fujiwara and H. Yamaguchi

    A multimode electromechanical parametric resonator array

    Sci Rep 4, 4448 (2014)

  5. I. Mahboob, H. Okamoto, K. Onomitsu and H. Yamaguchi

    Two-Mode Thermal-Noise Squeezing in an Electromechanical Resonator

    Phys. Rev. Lett. 113 (16), 167203 (2014)

  6. H. Okamoto, W. Izumida, Y. Hirayama, H. Yamaguchi, A. Riedel and K. J. Friedland

    Mechanical resonance characteristics of a cylindrical semiconductor heterostructure containing a high-mobility two-dimensional electron gas

    Phys. Rev. B 89 (24), 245304 (2014)

  7. H. Okamoto, I. Mahboob, K. Onomitsu and H. Yamaguchi

    Rapid switching in high-Q mechanical resonators

    Appl. Phys. Lett. 105 (8), 083114 (2014)

  8. J. Dai, R. Kometani, K. Onomitsu, Y. Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa

    Direct fabrication of a W-C SNS Josephson junction using focused-ion-beam chemical vapour deposition

    J. Micromech. Microeng. 24 (5), 055015 (2014)

  9. M. Takamura, H. Okamoto, K. Furukawa, H. Yamaguchi and H. Hibino

    Energy dissipation in edged and edgeless graphene mechanical resonators

    J. Appl. Phys. 116 (6), 064304 (2014)

  10. H. Gotoh, H. Sanada, H. Yamaguchi and T. Sogawa

    Nonlinear optical spectra having characteristics of Fano interferences in coherently coupled lowest exciton biexciton states in semiconductor quantum dots

    AIP Adv. 4 (10), 107124 (2014)

  11. H. Okamoto, S. Suzuki, H. Narita, T. Tawara, K. Tateno and H. Gotoh

    Deep-level transient spectroscopy characterization of In(Ga) As quantum dots fabricated using Bi as a surfactant

    Jpn. J. Appl. Phys. 53 (6), 06JG11 (2014)

  1. K. Adachi, N. Watanabe, H. Okamoto, H. Yamaguchi, T. Kimoto, and J. Suda

    Single-crystalline 4H-SiC micro cantilevers with a high quality factor

    Sens. Actuator A-Phys. 197, 122-125 (2013)

  2. S. Etaki, F. Konschelle, YM. Blanter, H. Yamaguchi, and HSJ. van der Zandt

    Self-sustained oscillations of a torsional SQUID resonator induced by Lorentz-force back-action

    Nat. Commun. 4, 1803 (2013)

  3. D. Hatanaka, I. Mahboob, K. Onomitsu, and H. Yamaguchi

    A phonon transistor in an electromechanical resonator array

    Appl. Phys. Lett. 102 (21), 213102 (2013)

  4. I. Mahboob, V. Nier, K. Nishiguchi, A. Fujiwara, and H. Yamaguchi

    Multi-mode parametric coupling in an electromechanical resonator

    Appl. Phys. Lett. 103 (15), (2013)

  5. I. Mahboob, K. Nishiguchi, A. Fujiwara, and H. Yamaguchi

    Phonon Lasing in an Electromechanical Resonator

    Phys. Rev. Lett. 110 (12), 127202 (2013)

  6. M. Nagase, H. Hibino, H. Kageshima, and H. Yamaguchi

    Graphene-Based Nano-Electro-Mechanical Switch with High On/Off Ratio

    Appl. Phys. Express 6 (5), 055101 (2013)

  7. H. Okamoto, A. Gourgout, CY. Chang, K. Onomitsu, I. Mahboob, EY. Chang, and H. Yamaguchi

    Coherent phonon manipulation in coupled mechanical resonators

    Nat. Phys. 9 (8), 480-484 (2013)

  8. Y. Okazaki, I. Mahboob, K. Onomitsu, S. Sasaki, and H. Yamaguchi

    Quantum point contact displacement transducer for a mechanical resonator at sub-Kelvin temperatures

    Appl. Phys. Lett. 103 (19), 192105 (2013)

  9. K. Onomitsu, I. Mahboob, H. Okamoto, Y. Krockenberger, and H. Yamaguchi

    Ferromagnetic-induced component in piezoresistance of GaMnAs

    Phys. Rev. B 87 (6), 060410 (2013)

  10. K. Onomitsu, M. Mitsuhara, H. Yamamoto, and H. Yamaguchi

    Ultrahigh-Q Micromechanical Resonators by Using Epitaxially Induced Tensile Strain in GaNAs

    Appl. Phys. Express 6 (11), 111201 (2013)

  11. S. Saito, XB. Zhu, R. Amsuess, Y. Matsuzaki, K. Kakuyanagi, T. Shimo-Oka, N. Mizuochi, K. Nemoto, WJ. Munro, and K. Semba

    Towards Realizing a Quantum Memory for a Superconducting Qubit: Storage and Retrieval of Quantum States

    Phys. Rev. Lett. 111 (10), 107008 (2013)

  12. H. Yamaguchi, and I. Mahboob

    Parametric mode mixing in asymmetric doubly clamped beam resonators

    New J. Phys. 15, 015023 (2013)

  13. K. Yamazaki, and H. Yamaguchi

    Universal three-dimensional nanofabrication for hard materials

    J. Vac. Sci. Technol. B 31 (5), 051802 (2013)

  14. J. Dai, K. Onomitsu, R. Kometani, Y. Krockenberger, H. Yamaguchi, S. Ishihara, and S. Warisawa

    Superconductivity in Tungsten-Carbide Nanowires Deposited from the Mixtures of W(CO)し6た and Cし14たHし10た

    Jpn. J. Appl. Phys. 52 (7), (2013)

  15. M. Takamura, K. Furukawa, H. Okamoto, S. Tanabe, H. Yamaguchi, and H. Hibino

    Epitaxial Trilayer Graphene Mechanical Resonators Obtained by Electrochemical Etching Combined with Hydrogen Intercalation

    Jpn. J. Appl. Phys. 52 (4), (2013)

  16. H. Gotoh, H. Sanada, H. Yamaguchi, and T. Sogawa

    Modifying exciton optical properties in quantum dots with coherent phonons induced by ultrafast optical pulses

    Appl. Phys. Lett. 103 (11), 112104 (2013)

  17. H. Hideki Gotoharuki H. Sanadairoshi Yamaguchi, and Tetsuomi Sogawa

    Direct Biexciton Creation with Two-Photon Excitation for Ideal Entangled Photon Pair Emissions in Optically Active Quantum Dots,

    J. Appl. Phys. 52, 120202, (2013)

  1. D. Hatanaka, I. Mahboob, H. Okamoto, K. Onomitsu, and H. Yamaguchi

    An electromechanical membrane resonator

    Applied Physics Letters 101 (6), 063102 (2012)

  2. W. Izumida, Y. Hirayama, H. Okamoto, H. Yamaguchi, and KJ. Friedland

    Mechanical vibration of a cylindrically rolled-up cantilever shell in microelectromechanical and nanoelectromechanical systems

    Physical Review B 85 (7), 075313 (2012)

  3. Y. Komatsuzaki, T. Kyougoku., K. Saba., K. Onomitsu., H. Yamaguchi., Y. Horikoshi.

    Electrical characteristics of in-plane gate logic devices

    Physica Status Solidi C 9 (2), 256256 (2012)

  4. I. Mahboob, K. Nishiguchi, H. Okamoto, and H. Yamaguchi

    Phonon-cavity electromechanics

    Nature Physics 8 (5), 387392 (2012)

  5. I. Mahboob, Q. Wilmart, K. Nishiguchi, A. Fujiwara, and H. Yamaguchi

    Tuneable electromechanical comb generation

    Applied Physics Letters 100 (11), 113109 (2012)

  6. J. Nishinaga, A. Kawaharazuka, K. Onomitsu, KH. Ploog, and Y. Horikoshi.

    Excitonic absorption on AlGaAs/GaAs superlattice solar cells

    Physica Status Solidi C 9 (2), 333333 (2012)

  7. T. Sakata, H. Ishii, M. Nagase, K. Takagahara, K. Kuwabara, K. Ono, N. Sato, and K. Machida

    Removal of Gold Oxide by Low-Temperature Hydrogen Annealing for Microelectromechanical System Device Fabrication

    Japanese Journal Of Applied Physics 51 (6), 066501 (2012)

  8. T. Watanabe, H. Okamoto, K. Onomitsu, H. Gotoh, T. Sogawa, and H. Yamaguchi

    Optomechanical photoabsorption spectroscopy of exciton states in GaAs

    Applied Physics Letters 101 (8), 082107 (2012)

  9. H. Yamaguchi, H. Okamoto, S. Ishihara, and Y. Hirayama

    Motion detection of a micromechanical cantilever through magneto-piezovoltage in two-dimensional electron systems

    Applied Physics Letters 100 (1), 012106 (2012)

  10. H. Yamaguchi, H. Okamoto, and I. Mahboob

    Coherent Control of Micro/Nanomechanical Oscillation Using Parametric Mode Mixing

    Applied Physics Express 5 (1), 014001 (2012)

  11. K. Yamazaki, and H. Yamaguchi

    Electron beam lithography on vertical side faces of micrometer-order Si block

    Journal Of Vacuum Science & Technology B 30 (4), 041601 (2012)

  12. O. Ryong-Sok, A. Iwamoto, Y. Nishi, Y. Funase, T. Yuasa, T. Tomita, M. Nagase, H. Hibino, and H. Yamaguchi

    Microscopic Raman Mapping of Epitaxial Graphene on 4H-SiC(0001)

    Japanese Journal Of Applied Physics 51 (6), 06FD06 (2012)

  13. H. Gotoh, H. Sanada, H. Yamaguchi, and T. Sogawa

    Charged exciton creation with two-color optical excitation method and analysis of initialization process of electron spin qubit in quantum dots

    Journal Of Applied Physics 111 (12), 123520 (2012)

  14. T. Sogawa, H. Sanada, H. Gotoh, H. Yamaguchi, and PV. Santos

    Dynamic control of photoluminescence polarization properties in GaAs/AlAs quantum wells by surface acoustic waves

    Physical Review B 86 (3), 035311 (2012)

  15. T. Sogawa, H. Sanada, H. Gotoh, H. Yamaguchi, and PV. Santos

    Spatially modulated photoluminescence properties in dynamically strained GaAs/AlAs quantum wells by surface acoustic wave

    Applied Physics Letters 100 (16), 162109 (2012)